My company needs to design an Impedance Matching network for a 13.56MHz RF Generator for Plasma Sputtering applications.
This is very similar to the average Antenna Tuner, i.e. we need to measure Forward and Reflected Power, and adjust Vacuum Capacitors in the Matching
Network.
The frequency is fixed, so Inductor does not need to change, just the Ct and Cl.
We also want to have it tune automatically, as the plasma impedance changes with gas flow.
I could actually use an Auto Tuner used for Ham Applications, but I can't find one that is rated to 5kW.
Anybody have any experience in this field......want to do some consulting for us?
This is very similar to the average Antenna Tuner, i.e. we need to measure Forward and Reflected Power, and adjust Vacuum Capacitors in the Matching
Network.
The frequency is fixed, so Inductor does not need to change, just the Ct and Cl.
We also want to have it tune automatically, as the plasma impedance changes with gas flow.
I could actually use an Auto Tuner used for Ham Applications, but I can't find one that is rated to 5kW.
Anybody have any experience in this field......want to do some consulting for us?